San DIego-based Cymer, the supplier of light sources for lithography systems for the semiconductor industry, has been acquired by ASML, a Netherlands-based provider of lithography systems. ASML said it will acquire all of the outstanding shares of Cymer in a deal worth EUR 1.95 billion (2.55 billion US dollars). The deal is a mix of cash and stock. Cymer's products are used as a core part of the semiconductor device manufacturing process. ASML said that it has been collaborating with Cymer on products for over a year.