Southern California High Tech Event Calendar
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| RIE Processes for MEMS Applications |
| Date: September 23, 2004 |
| Location: Camarillo |
| "Chlorine-based Reactive Ion Etching Process to Pattern Platinum for MEMS Applications" IEEE Buenaventura Circuits and Systems Society. Contact Zhijian Hua, zhua@ieee.org |
| More information: | Download to Calendar  |